Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering
نویسندگان
چکیده
Ferroelectric thin films are currently being used to develop tunable microwave circuits based on the electric-field dependence of the dielectric constant. (Ba0.5Sr0.5)TiO3 ~BST! films prepared by sputtering on Pt/TiO2 /SiO2 /Si substrates are found to exhibit a capacitance change ~tunability! of nearly 4:1. Higher tunability has been attributed to the ~100! texturing of the BST films and is a result of the biaxial tensile stress imposed by Si on BST making the polar axis oriented in plane. Electrical characterization shows that the dielectric permittivity increases with increase in film thickness ~up to ;200 nm!. © 1999 American Institute of Physics. @S0003-6951~99!03646-3#
منابع مشابه
High tunability in compositionally graded epitaxial barium strontium titanate thin films by pulsed-laser deposition
Compositionally graded barium strontium titanate @(BaxSr12x)TiO3—BST, x50.75, 0.8, 0.9, and 1.0# thin films are fabricated by pulsed-laser deposition on a LaAlO3 substrate with (La0.7Sr0.3)MnO3 as the bottom electrode. A high dielectric permittivity and temperature characteristic without Curie–Weiss law are obtained. A tunability of over 70% is obtained at frequency of 1 MHz, which is higher th...
متن کاملAtomic Structure Determination of Ba4Ti5O10 and Ba4Ti4O11 in Epitaxial Barium Titanate Nanodomains Using HRTEM and Electron Diffraction
Perovskite BaTiO3 thin films have a wide range of applications for advanced devices. Especially, epitaxial BaTiO3 thin films are highly desirable for these advanced applications. So far, such epitaxial BaTiO3 films have been successfully fabricated on different single-crystal substrates using various deposition techniques including RF magnetron sputtering, molecular beam epitaxy, metallorganic ...
متن کاملتأثیر فرایند سینتر بر خواص الکتریکی و ریزساختاری تارگت کندوپاش و لایهی نازک باریوم استرانسیوم تیتانات
In this study the effect of sintering parameters on the microstructure and electrical properties of the barium strontium titanate sputtering target is investigated. For optimizing the sintering temperature, BST compacts sintered at various temperatures ranging from 1200 to 1400 ºC for 2 hours. The sintered Barium Strontium Titanate sputtering target comprising with a high density, purity and a ...
متن کاملFabrication and characterization of ferro- and piezoelectric multilayer devices for high frequency applications [Ferro- ja pietsosähköisten monikerroskomponenttien valmistus ja karakterisointi suurtaajuussovelluksiin]
By means of thin film technology a reduction of size, cost, and power consumption of electronic circuits can be achieved. The required specifications are attained by proper design and combinations of innovative materials and manufacturing technologies. This thesis focuses on the development and fabrication of low-loss ceramic thin film devices for radio and microwave frequency applications. The...
متن کاملThe effect of sputtering RF power on structural, optical and electrical properties of CuO and CuO2 thin films
In this paper, the RF power change effect on the structural, optical and electrical properties of CuO thin films prepared by RF reactive magnetron sputtering deposited on glass substrates are studied. At first, the thin films are prepared at 150, 280, 310 and 340W respectively. Then, the films are characterized by XRD, AFM, Uv-visible and four-point probe analysis respectively. The results show...
متن کامل